7/11/2011	9:14:03 AM	Program exited cleanly
7/11/2011	9:15:44 AM	Program started normally
7/11/2011	9:15:44 AM	Helium valve closed
7/11/2011	9:15:44 AM	H2 valve closed
7/11/2011	9:15:44 AM	BCl3 valve closed
7/11/2011	9:15:44 AM	PH3 valve closed
7/11/2011	9:15:44 AM	SiCl4 pre valve closed
7/11/2011	9:15:44 AM	SiCl4 post valve closed
7/11/2011	9:15:44 AM	Main Vac valve closed
7/11/2011	9:15:44 AM	Bypass valve closed
7/11/2011	9:15:44 AM	Bubbler valve closed
7/11/2011	9:15:44 AM	Helium MFC set to  0.000000
7/11/2011	9:15:44 AM	H2 MFC set to  0.000000
7/11/2011	9:15:44 AM	BCl3 MFC set to  0.000000
7/11/2011	9:15:44 AM	PHl3 MFC set to  0.000000
7/11/2011	9:15:44 AM	SiCl4 MFC set to  0.000000
7/11/2011	9:15:44 AM	Bypass solenoid MFC set to  760.000000
7/11/2011	9:15:44 AM	Tube furnace set to 0
7/11/2011	9:15:46 AM	Main Vac valve opened
7/11/2011	9:18:21 AM	Recipe started at 9:18 AM
7/11/2011	9:18:21 AM	Helium valve closed
7/11/2011	9:18:21 AM	H2 valve closed
7/11/2011	9:18:21 AM	BCl3 valve closed
7/11/2011	9:18:21 AM	PH3 valve closed
7/11/2011	9:18:21 AM	SiCl4 pre valve closed
7/11/2011	9:18:21 AM	SiCl4 post valve closed
7/11/2011	9:18:21 AM	Bypass valve closed
7/11/2011	9:18:21 AM	Bubbler valve closed
7/11/2011	9:18:21 AM	Main Vac valve opened
7/11/2011	9:18:21 AM	Helium MFC set to  0.000000
7/11/2011	9:18:21 AM	H2 MFC set to  0.000000
7/11/2011	9:18:21 AM	BCl3 MFC set to  0.000000
7/11/2011	9:18:21 AM	PHl3 MFC set to  0.000000
7/11/2011	9:18:21 AM	SiCl4 MFC set to  0.000000
7/11/2011	9:18:21 AM	Bypass solenoid MFC set to  0.000000
7/11/2011	9:18:21 AM	Tube furnace set to 0
7/11/2011	9:18:21 AM	Run finished at 9:18 AM
7/11/2011	9:18:51 AM	Program exited cleanly
7/11/2011	9:20:32 AM	Program started normally
7/11/2011	9:20:32 AM	Helium valve closed
7/11/2011	9:20:32 AM	H2 valve closed
7/11/2011	9:20:32 AM	BCl3 valve closed
7/11/2011	9:20:32 AM	PH3 valve closed
7/11/2011	9:20:32 AM	SiCl4 pre valve closed
7/11/2011	9:20:32 AM	SiCl4 post valve closed
7/11/2011	9:20:32 AM	Main Vac valve closed
7/11/2011	9:20:32 AM	Bypass valve closed
7/11/2011	9:20:32 AM	Bubbler valve closed
7/11/2011	9:20:32 AM	Helium MFC set to  0.000000
7/11/2011	9:20:32 AM	H2 MFC set to  0.000000
7/11/2011	9:20:32 AM	BCl3 MFC set to  0.000000
7/11/2011	9:20:32 AM	PHl3 MFC set to  0.000000
7/11/2011	9:20:32 AM	SiCl4 MFC set to  0.000000
7/11/2011	9:20:32 AM	Bypass solenoid MFC set to  760.000000
7/11/2011	9:20:32 AM	Tube furnace set to 0
7/11/2011	9:20:35 AM	Main Vac valve opened
7/11/2011	9:20:53 AM	Program exited cleanly
7/11/2011	9:22:26 AM	Program started normally
7/11/2011	9:22:26 AM	Helium valve closed
7/11/2011	9:22:26 AM	H2 valve closed
7/11/2011	9:22:26 AM	BCl3 valve closed
7/11/2011	9:22:26 AM	PH3 valve closed
7/11/2011	9:22:26 AM	SiCl4 pre valve closed
7/11/2011	9:22:26 AM	SiCl4 post valve closed
7/11/2011	9:22:26 AM	Main Vac valve closed
7/11/2011	9:22:26 AM	Bypass valve closed
7/11/2011	9:22:26 AM	Bubbler valve closed
7/11/2011	9:22:26 AM	Helium MFC set to  0.000000
7/11/2011	9:22:26 AM	H2 MFC set to  0.000000
7/11/2011	9:22:26 AM	BCl3 MFC set to  0.000000
7/11/2011	9:22:26 AM	PHl3 MFC set to  0.000000
7/11/2011	9:22:26 AM	SiCl4 MFC set to  0.000000
7/11/2011	9:22:26 AM	Bypass solenoid MFC set to  760.000000
7/11/2011	9:22:26 AM	Tube furnace set to 0
7/11/2011	9:22:27 AM	Main Vac valve opened
7/11/2011	9:24:24 AM	Program exited cleanly
7/11/2011	9:30:28 AM	Program started normally
7/11/2011	9:30:28 AM	Helium valve closed
7/11/2011	9:30:28 AM	H2 valve closed
7/11/2011	9:30:28 AM	BCl3 valve closed
7/11/2011	9:30:28 AM	PH3 valve closed
7/11/2011	9:30:28 AM	SiCl4 pre valve closed
7/11/2011	9:30:28 AM	SiCl4 post valve closed
7/11/2011	9:30:28 AM	Main Vac valve closed
7/11/2011	9:30:28 AM	Bypass valve closed
7/11/2011	9:30:28 AM	Bubbler valve closed
7/11/2011	9:30:28 AM	Helium MFC set to  0.000000
7/11/2011	9:30:28 AM	H2 MFC set to  0.000000
7/11/2011	9:30:28 AM	BCl3 MFC set to  0.000000
7/11/2011	9:30:28 AM	PHl3 MFC set to  0.000000
7/11/2011	9:30:28 AM	SiCl4 MFC set to  0.000000
7/11/2011	9:30:28 AM	Bypass solenoid MFC set to  760.000000
7/11/2011	9:30:28 AM	Tube furnace set to 0
7/11/2011	9:30:33 AM	Main Vac valve opened
7/11/2011	9:31:02 AM	Program exited cleanly
7/11/2011	9:38:02 AM	Program started normally
7/11/2011	9:38:02 AM	Helium valve closed
7/11/2011	9:38:02 AM	H2 valve closed
7/11/2011	9:38:02 AM	BCl3 valve closed
7/11/2011	9:38:02 AM	PH3 valve closed
7/11/2011	9:38:02 AM	SiCl4 pre valve closed
7/11/2011	9:38:02 AM	SiCl4 post valve closed
7/11/2011	9:38:02 AM	Main Vac valve closed
7/11/2011	9:38:02 AM	Bypass valve closed
7/11/2011	9:38:02 AM	Bubbler valve closed
7/11/2011	9:38:02 AM	Helium MFC set to  0.000000
7/11/2011	9:38:02 AM	H2 MFC set to  0.000000
7/11/2011	9:38:02 AM	BCl3 MFC set to  0.000000
7/11/2011	9:38:02 AM	PHl3 MFC set to  0.000000
7/11/2011	9:38:02 AM	SiCl4 MFC set to  0.000000
7/11/2011	9:38:02 AM	Bypass solenoid MFC set to  760.000000
7/11/2011	9:38:02 AM	Tube furnace set to 0
7/11/2011	9:38:03 AM	Main Vac valve opened
7/11/2011	9:55:15 AM	Program exited cleanly
7/11/2011	9:55:57 AM	Program started normally
7/11/2011	9:55:57 AM	Helium valve closed
7/11/2011	9:55:57 AM	H2 valve closed
7/11/2011	9:55:57 AM	BCl3 valve closed
7/11/2011	9:55:57 AM	PH3 valve closed
7/11/2011	9:55:57 AM	SiCl4 pre valve closed
7/11/2011	9:55:57 AM	SiCl4 post valve closed
7/11/2011	9:55:57 AM	Main Vac valve closed
7/11/2011	9:55:57 AM	Bypass valve closed
7/11/2011	9:55:57 AM	Bubbler valve closed
7/11/2011	9:55:57 AM	Helium MFC set to  0.000000
7/11/2011	9:55:57 AM	H2 MFC set to  0.000000
7/11/2011	9:55:57 AM	BCl3 MFC set to  0.000000
7/11/2011	9:55:57 AM	PHl3 MFC set to  0.000000
7/11/2011	9:55:57 AM	SiCl4 MFC set to  0.000000
7/11/2011	9:55:57 AM	Bypass solenoid MFC set to  760.000000
7/11/2011	9:55:57 AM	Tube furnace set to 0
7/11/2011	9:56:13 AM	Program exited cleanly
7/11/2011	9:56:19 AM	Program started normally
7/11/2011	9:56:19 AM	Helium valve closed
7/11/2011	9:56:19 AM	H2 valve closed
7/11/2011	9:56:19 AM	BCl3 valve closed
7/11/2011	9:56:19 AM	PH3 valve closed
7/11/2011	9:56:19 AM	SiCl4 pre valve closed
7/11/2011	9:56:19 AM	SiCl4 post valve closed
7/11/2011	9:56:19 AM	Main Vac valve closed
7/11/2011	9:56:19 AM	Bypass valve closed
7/11/2011	9:56:19 AM	Bubbler valve closed
7/11/2011	9:56:19 AM	Helium MFC set to  0.000000
7/11/2011	9:56:19 AM	H2 MFC set to  0.000000
7/11/2011	9:56:19 AM	BCl3 MFC set to  0.000000
7/11/2011	9:56:19 AM	PHl3 MFC set to  0.000000
7/11/2011	9:56:19 AM	SiCl4 MFC set to  0.000000
7/11/2011	9:56:19 AM	Bypass solenoid MFC set to  760.000000
7/11/2011	9:56:19 AM	Tube furnace set to 0
7/11/2011	9:56:20 AM	Main Vac valve opened
7/11/2011	9:57:16 AM	Program exited cleanly
7/11/2011	10:01:06 AM	Program started normally
7/11/2011	10:01:06 AM	Helium valve closed
7/11/2011	10:01:06 AM	H2 valve closed
7/11/2011	10:01:06 AM	BCl3 valve closed
7/11/2011	10:01:06 AM	PH3 valve closed
7/11/2011	10:01:06 AM	SiCl4 pre valve closed
7/11/2011	10:01:06 AM	SiCl4 post valve closed
7/11/2011	10:01:06 AM	Main Vac valve closed
7/11/2011	10:01:06 AM	Bypass valve closed
7/11/2011	10:01:06 AM	Bubbler valve closed
7/11/2011	10:01:06 AM	Helium MFC set to  0.000000
7/11/2011	10:01:06 AM	H2 MFC set to  0.000000
7/11/2011	10:01:06 AM	BCl3 MFC set to  0.000000
7/11/2011	10:01:06 AM	PHl3 MFC set to  0.000000
7/11/2011	10:01:06 AM	SiCl4 MFC set to  0.000000
7/11/2011	10:01:06 AM	Bypass solenoid MFC set to  760.000000
7/11/2011	10:01:06 AM	Tube furnace set to 0
7/11/2011	10:05:27 AM	Program exited cleanly
7/11/2011	10:05:29 AM	Program started normally
7/11/2011	10:05:29 AM	Helium valve closed
7/11/2011	10:05:29 AM	H2 valve closed
7/11/2011	10:05:29 AM	BCl3 valve closed
7/11/2011	10:05:29 AM	PH3 valve closed
7/11/2011	10:05:29 AM	SiCl4 pre valve closed
7/11/2011	10:05:29 AM	SiCl4 post valve closed
7/11/2011	10:05:29 AM	Main Vac valve closed
7/11/2011	10:05:29 AM	Bypass valve closed
7/11/2011	10:05:29 AM	Bubbler valve closed
7/11/2011	10:05:29 AM	Helium MFC set to  0.000000
7/11/2011	10:05:29 AM	H2 MFC set to  0.000000
7/11/2011	10:05:29 AM	BCl3 MFC set to  0.000000
7/11/2011	10:05:29 AM	PHl3 MFC set to  0.000000
7/11/2011	10:05:29 AM	SiCl4 MFC set to  0.000000
7/11/2011	10:05:29 AM	Bypass solenoid MFC set to  760.000000
7/11/2011	10:05:29 AM	Tube furnace set to 0
7/11/2011	10:06:10 AM	Program exited cleanly
7/11/2011	10:10:00 AM	Program started normally
7/11/2011	10:10:00 AM	Helium valve closed
7/11/2011	10:10:00 AM	H2 valve closed
7/11/2011	10:10:00 AM	BCl3 valve closed
7/11/2011	10:10:00 AM	PH3 valve closed
7/11/2011	10:10:00 AM	SiCl4 pre valve closed
7/11/2011	10:10:00 AM	SiCl4 post valve closed
7/11/2011	10:10:00 AM	Main Vac valve closed
7/11/2011	10:10:00 AM	Bypass valve closed
7/11/2011	10:10:00 AM	Bubbler valve closed
7/11/2011	10:10:00 AM	Helium MFC set to  0.000000
7/11/2011	10:10:00 AM	H2 MFC set to  0.000000
7/11/2011	10:10:00 AM	BCl3 MFC set to  0.000000
7/11/2011	10:10:00 AM	PHl3 MFC set to  0.000000
7/11/2011	10:10:00 AM	SiCl4 MFC set to  0.000000
7/11/2011	10:10:00 AM	Bypass solenoid MFC set to  760.000000
7/11/2011	10:10:00 AM	Tube furnace set to 0
7/11/2011	10:10:10 AM	Program exited cleanly
7/11/2011	10:30:51 AM	Program started normally
7/11/2011	10:30:51 AM	Helium valve closed
7/11/2011	10:30:51 AM	H2 valve closed
7/11/2011	10:30:51 AM	BCl3 valve closed
7/11/2011	10:30:51 AM	PH3 valve closed
7/11/2011	10:30:51 AM	SiCl4 pre valve closed
7/11/2011	10:30:51 AM	SiCl4 post valve closed
7/11/2011	10:30:51 AM	Main Vac valve closed
7/11/2011	10:30:51 AM	Bypass valve closed
7/11/2011	10:30:51 AM	Bubbler valve closed
7/11/2011	10:30:51 AM	Helium MFC set to  0.000000
7/11/2011	10:30:51 AM	H2 MFC set to  0.000000
7/11/2011	10:30:51 AM	BCl3 MFC set to  0.000000
7/11/2011	10:30:51 AM	PHl3 MFC set to  0.000000
7/11/2011	10:30:51 AM	SiCl4 MFC set to  0.000000
7/11/2011	10:30:51 AM	Bypass solenoid MFC set to  760.000000
7/11/2011	10:30:51 AM	Tube furnace set to 0
7/11/2011	10:32:52 AM	Program exited cleanly
7/11/2011	10:32:54 AM	Program started normally
7/11/2011	10:32:54 AM	Helium valve closed
7/11/2011	10:32:54 AM	H2 valve closed
7/11/2011	10:32:54 AM	BCl3 valve closed
7/11/2011	10:32:54 AM	PH3 valve closed
7/11/2011	10:32:54 AM	SiCl4 pre valve closed
7/11/2011	10:32:54 AM	SiCl4 post valve closed
7/11/2011	10:32:54 AM	Main Vac valve closed
7/11/2011	10:32:54 AM	Bypass valve closed
7/11/2011	10:32:54 AM	Bubbler valve closed
7/11/2011	10:32:54 AM	Helium MFC set to  0.000000
7/11/2011	10:32:54 AM	H2 MFC set to  0.000000
7/11/2011	10:32:54 AM	BCl3 MFC set to  0.000000
7/11/2011	10:32:54 AM	PHl3 MFC set to  0.000000
7/11/2011	10:32:54 AM	SiCl4 MFC set to  0.000000
7/11/2011	10:32:54 AM	Bypass solenoid MFC set to  760.000000
7/11/2011	10:32:55 AM	Tube furnace set to 0
7/11/2011	10:33:04 AM	Main Vac valve opened
7/11/2011	10:34:38 AM	Program exited cleanly
7/11/2011	11:07:51 AM	Program started normally
7/11/2011	11:07:51 AM	Helium valve closed
7/11/2011	11:07:51 AM	H2 valve closed
7/11/2011	11:07:51 AM	BCl3 valve closed
7/11/2011	11:07:51 AM	PH3 valve closed
7/11/2011	11:07:51 AM	SiCl4 pre valve closed
7/11/2011	11:07:51 AM	SiCl4 post valve closed
7/11/2011	11:07:51 AM	Main Vac valve closed
7/11/2011	11:07:51 AM	Bypass valve closed
7/11/2011	11:07:51 AM	Bubbler valve closed
7/11/2011	11:07:51 AM	Helium MFC set to  0.000000
7/11/2011	11:07:51 AM	H2 MFC set to  0.000000
7/11/2011	11:07:51 AM	BCl3 MFC set to  0.000000
7/11/2011	11:07:51 AM	PHl3 MFC set to  0.000000
7/11/2011	11:07:51 AM	SiCl4 MFC set to  0.000000
7/11/2011	11:07:51 AM	Bypass solenoid MFC set to  760.000000
7/11/2011	11:07:51 AM	Tube furnace set to 0
7/11/2011	11:07:55 AM	Main Vac valve opened
7/11/2011	11:14:58 AM	Program exited cleanly
7/11/2011	11:14:59 AM	Program started normally
7/11/2011	11:14:59 AM	Helium valve closed
7/11/2011	11:14:59 AM	H2 valve closed
7/11/2011	11:14:59 AM	BCl3 valve closed
7/11/2011	11:14:59 AM	PH3 valve closed
7/11/2011	11:14:59 AM	SiCl4 pre valve closed
7/11/2011	11:14:59 AM	SiCl4 post valve closed
7/11/2011	11:14:59 AM	Main Vac valve closed
7/11/2011	11:14:59 AM	Bypass valve closed
7/11/2011	11:14:59 AM	Bubbler valve closed
7/11/2011	11:14:59 AM	Helium MFC set to  0.000000
7/11/2011	11:14:59 AM	H2 MFC set to  0.000000
7/11/2011	11:14:59 AM	BCl3 MFC set to  0.000000
7/11/2011	11:14:59 AM	PHl3 MFC set to  0.000000
7/11/2011	11:14:59 AM	SiCl4 MFC set to  0.000000
7/11/2011	11:14:59 AM	Bypass solenoid MFC set to  760.000000
7/11/2011	11:14:59 AM	Tube furnace set to 0
7/11/2011	11:15:00 AM	Main Vac valve opened
7/11/2011	11:15:38 AM	Program exited cleanly
7/11/2011	11:15:40 AM	Program started normally
7/11/2011	11:15:40 AM	Helium valve closed
7/11/2011	11:15:40 AM	H2 valve closed
7/11/2011	11:15:40 AM	BCl3 valve closed
7/11/2011	11:15:40 AM	PH3 valve closed
7/11/2011	11:15:40 AM	SiCl4 pre valve closed
7/11/2011	11:15:40 AM	SiCl4 post valve closed
7/11/2011	11:15:40 AM	Main Vac valve closed
7/11/2011	11:15:40 AM	Bypass valve closed
7/11/2011	11:15:40 AM	Bubbler valve closed
7/11/2011	11:15:40 AM	Helium MFC set to  0.000000
7/11/2011	11:15:40 AM	H2 MFC set to  0.000000
7/11/2011	11:15:40 AM	BCl3 MFC set to  0.000000
7/11/2011	11:15:40 AM	PHl3 MFC set to  0.000000
7/11/2011	11:15:40 AM	SiCl4 MFC set to  0.000000
7/11/2011	11:15:40 AM	Bypass solenoid MFC set to  760.000000
7/11/2011	11:15:40 AM	Tube furnace set to 0
7/11/2011	11:15:43 AM	Main Vac valve opened
7/11/2011	11:53:43 AM	Program exited cleanly
7/11/2011	11:54:06 AM	Program started normally
7/11/2011	11:54:06 AM	Helium valve closed
7/11/2011	11:54:06 AM	H2 valve closed
7/11/2011	11:54:06 AM	BCl3 valve closed
7/11/2011	11:54:06 AM	PH3 valve closed
7/11/2011	11:54:06 AM	SiCl4 pre valve closed
7/11/2011	11:54:06 AM	SiCl4 post valve closed
7/11/2011	11:54:06 AM	Main Vac valve closed
7/11/2011	11:54:06 AM	Bypass valve closed
7/11/2011	11:54:06 AM	Bubbler valve closed
7/11/2011	11:54:06 AM	Helium MFC set to  0.000000
7/11/2011	11:54:06 AM	H2 MFC set to  0.000000
7/11/2011	11:54:06 AM	BCl3 MFC set to  0.000000
7/11/2011	11:54:06 AM	PHl3 MFC set to  0.000000
7/11/2011	11:54:06 AM	SiCl4 MFC set to  0.000000
7/11/2011	11:54:06 AM	Bypass solenoid MFC set to  760.000000
7/11/2011	11:54:06 AM	Tube furnace set to 0
7/11/2011	11:54:07 AM	Main Vac valve opened
7/11/2011	11:55:19 AM	Program exited cleanly
7/11/2011	11:56:12 AM	Program started normally
7/11/2011	11:56:12 AM	Helium valve closed
7/11/2011	11:56:12 AM	H2 valve closed
7/11/2011	11:56:12 AM	BCl3 valve closed
7/11/2011	11:56:12 AM	PH3 valve closed
7/11/2011	11:56:12 AM	SiCl4 pre valve closed
7/11/2011	11:56:12 AM	SiCl4 post valve closed
7/11/2011	11:56:12 AM	Main Vac valve closed
7/11/2011	11:56:12 AM	Bypass valve closed
7/11/2011	11:56:12 AM	Bubbler valve closed
7/11/2011	11:56:12 AM	Helium MFC set to  0.000000
7/11/2011	11:56:12 AM	H2 MFC set to  0.000000
7/11/2011	11:56:12 AM	BCl3 MFC set to  0.000000
7/11/2011	11:56:12 AM	PHl3 MFC set to  0.000000
7/11/2011	11:56:12 AM	SiCl4 MFC set to  0.000000
7/11/2011	11:56:12 AM	Bypass solenoid MFC set to  760.000000
7/11/2011	11:56:12 AM	Tube furnace set to 0
7/11/2011	11:56:13 AM	Main Vac valve opened
7/11/2011	11:56:25 AM	Program exited cleanly
7/11/2011	11:56:51 AM	Program started normally
7/11/2011	11:56:51 AM	Helium valve closed
7/11/2011	11:56:51 AM	H2 valve closed
7/11/2011	11:56:51 AM	BCl3 valve closed
7/11/2011	11:56:51 AM	PH3 valve closed
7/11/2011	11:56:51 AM	SiCl4 pre valve closed
7/11/2011	11:56:51 AM	SiCl4 post valve closed
7/11/2011	11:56:51 AM	Main Vac valve closed
7/11/2011	11:56:51 AM	Bypass valve closed
7/11/2011	11:56:51 AM	Bubbler valve closed
7/11/2011	11:56:51 AM	Helium MFC set to  0.000000
7/11/2011	11:56:51 AM	H2 MFC set to  0.000000
7/11/2011	11:56:51 AM	BCl3 MFC set to  0.000000
7/11/2011	11:56:51 AM	PHl3 MFC set to  0.000000
7/11/2011	11:56:51 AM	SiCl4 MFC set to  0.000000
7/11/2011	11:56:51 AM	Bypass solenoid MFC set to  760.000000
7/11/2011	11:56:52 AM	Tube furnace set to 0
7/11/2011	11:56:52 AM	Main Vac valve opened
7/11/2011	1:00:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/11/2011	1:00:01 PM	Recipe started at 1:00 PM
7/11/2011	1:00:01 PM	H2 valve closed
7/11/2011	1:00:01 PM	BCl3 valve closed
7/11/2011	1:00:01 PM	PH3 valve closed
7/11/2011	1:00:01 PM	SiCl4 pre valve closed
7/11/2011	1:00:01 PM	SiCl4 post valve closed
7/11/2011	1:00:01 PM	Main Vac valve closed
7/11/2011	1:00:01 PM	Bypass valve closed
7/11/2011	1:00:01 PM	Bubbler valve closed
7/11/2011	1:00:01 PM	Helium valve opened
7/11/2011	1:00:01 PM	Helium MFC set to  500.000000
7/11/2011	1:00:01 PM	H2 MFC set to  0.000000
7/11/2011	1:00:01 PM	BCl3 MFC set to  0.000000
7/11/2011	1:00:01 PM	PHl3 MFC set to  0.000000
7/11/2011	1:00:01 PM	SiCl4 MFC set to  0.000000
7/11/2011	1:00:01 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	1:00:01 PM	Tube furnace set to 0
7/11/2011	1:00:42 PM	Helium valve closed
7/11/2011	1:00:42 PM	H2 valve closed
7/11/2011	1:00:42 PM	BCl3 valve closed
7/11/2011	1:00:42 PM	PH3 valve closed
7/11/2011	1:00:42 PM	SiCl4 pre valve closed
7/11/2011	1:00:42 PM	SiCl4 post valve closed
7/11/2011	1:00:42 PM	Main Vac valve closed
7/11/2011	1:00:42 PM	Bypass valve closed
7/11/2011	1:00:42 PM	Bubbler valve closed
7/11/2011	1:00:42 PM	Helium MFC set to  0.000000
7/11/2011	1:00:42 PM	H2 MFC set to  0.000000
7/11/2011	1:00:42 PM	BCl3 MFC set to  0.000000
7/11/2011	1:00:42 PM	PHl3 MFC set to  0.000000
7/11/2011	1:00:42 PM	SiCl4 MFC set to  0.000000
7/11/2011	1:00:42 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	1:00:42 PM	Tube furnace set to 0
7/11/2011	1:00:43 PM	Run finished at 1:00 PM
7/11/2011	1:00:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/11/2011	1:00:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2011	1:00:47 PM	Recipe started at 1:00 PM
7/11/2011	1:00:47 PM	Helium valve closed
7/11/2011	1:00:47 PM	H2 valve closed
7/11/2011	1:00:47 PM	BCl3 valve closed
7/11/2011	1:00:47 PM	PH3 valve closed
7/11/2011	1:00:47 PM	SiCl4 pre valve closed
7/11/2011	1:00:47 PM	SiCl4 post valve closed
7/11/2011	1:00:47 PM	Main Vac valve closed
7/11/2011	1:00:47 PM	Bubbler valve closed
7/11/2011	1:00:47 PM	Bypass valve opened
7/11/2011	1:00:47 PM	Helium MFC set to  0.000000
7/11/2011	1:00:47 PM	H2 MFC set to  0.000000
7/11/2011	1:00:47 PM	BCl3 MFC set to  0.000000
7/11/2011	1:00:47 PM	PHl3 MFC set to  0.000000
7/11/2011	1:00:47 PM	SiCl4 MFC set to  0.000000
7/11/2011	1:00:47 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	1:00:47 PM	Tube furnace set to 0
7/11/2011	1:01:38 PM	Helium valve closed
7/11/2011	1:01:38 PM	H2 valve closed
7/11/2011	1:01:38 PM	BCl3 valve closed
7/11/2011	1:01:38 PM	PH3 valve closed
7/11/2011	1:01:38 PM	SiCl4 pre valve closed
7/11/2011	1:01:38 PM	SiCl4 post valve closed
7/11/2011	1:01:38 PM	Main Vac valve closed
7/11/2011	1:01:38 PM	Bubbler valve closed
7/11/2011	1:01:38 PM	Bypass valve opened
7/11/2011	1:01:38 PM	Helium MFC set to  0.000000
7/11/2011	1:01:38 PM	H2 MFC set to  0.000000
7/11/2011	1:01:38 PM	BCl3 MFC set to  0.000000
7/11/2011	1:01:38 PM	PHl3 MFC set to  0.000000
7/11/2011	1:01:38 PM	SiCl4 MFC set to  0.000000
7/11/2011	1:01:38 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	1:01:39 PM	Tube furnace set to 0
7/11/2011	1:02:39 PM	Helium valve closed
7/11/2011	1:02:39 PM	H2 valve closed
7/11/2011	1:02:39 PM	BCl3 valve closed
7/11/2011	1:02:39 PM	PH3 valve closed
7/11/2011	1:02:39 PM	SiCl4 pre valve closed
7/11/2011	1:02:39 PM	SiCl4 post valve closed
7/11/2011	1:02:39 PM	Bypass valve closed
7/11/2011	1:02:39 PM	Bubbler valve closed
7/11/2011	1:02:39 PM	Main Vac valve opened
7/11/2011	1:02:39 PM	Helium MFC set to  0.000000
7/11/2011	1:02:39 PM	H2 MFC set to  0.000000
7/11/2011	1:02:39 PM	BCl3 MFC set to  0.000000
7/11/2011	1:02:39 PM	PHl3 MFC set to  0.000000
7/11/2011	1:02:39 PM	SiCl4 MFC set to  0.000000
7/11/2011	1:02:39 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	1:02:39 PM	Tube furnace set to 0
7/11/2011	1:02:40 PM	Run finished at 1:02 PM
7/11/2011	1:02:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2011	1:03:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/11/2011	1:03:20 PM	Recipe started at 1:03 PM
7/11/2011	1:03:20 PM	H2 valve closed
7/11/2011	1:03:20 PM	BCl3 valve closed
7/11/2011	1:03:20 PM	PH3 valve closed
7/11/2011	1:03:20 PM	SiCl4 pre valve closed
7/11/2011	1:03:20 PM	SiCl4 post valve closed
7/11/2011	1:03:20 PM	Main Vac valve closed
7/11/2011	1:03:20 PM	Bypass valve closed
7/11/2011	1:03:20 PM	Bubbler valve closed
7/11/2011	1:03:20 PM	Helium valve opened
7/11/2011	1:03:20 PM	Helium MFC set to  500.000000
7/11/2011	1:03:20 PM	H2 MFC set to  0.000000
7/11/2011	1:03:20 PM	BCl3 MFC set to  0.000000
7/11/2011	1:03:20 PM	PHl3 MFC set to  0.000000
7/11/2011	1:03:20 PM	SiCl4 MFC set to  0.000000
7/11/2011	1:03:20 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	1:03:20 PM	Tube furnace set to 0
7/11/2011	1:03:27 PM	Run aborted at 1:03 PM
7/11/2011	1:03:27 PM	Helium valve closed
7/11/2011	1:03:27 PM	H2 valve closed
7/11/2011	1:03:27 PM	BCl3 valve closed
7/11/2011	1:03:27 PM	PH3 valve closed
7/11/2011	1:03:27 PM	SiCl4 pre valve closed
7/11/2011	1:03:27 PM	SiCl4 post valve closed
7/11/2011	1:03:27 PM	Bypass valve closed
7/11/2011	1:03:27 PM	Main Vac valve closed
7/11/2011	1:03:27 PM	Bubbler valve closed
7/11/2011	1:03:27 PM	Helium MFC set to  0.000000
7/11/2011	1:03:27 PM	H2 MFC set to  0.000000
7/11/2011	1:03:27 PM	BCl3 MFC set to  0.000000
7/11/2011	1:03:27 PM	PHl3 MFC set to  0.000000
7/11/2011	1:03:27 PM	SiCl4 MFC set to  0.000000
7/11/2011	1:03:28 PM	Tube furnace set to 0
7/11/2011	1:03:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/11/2011	1:03:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2011	1:03:31 PM	Recipe started at 1:03 PM
7/11/2011	1:03:31 PM	Helium valve closed
7/11/2011	1:03:31 PM	H2 valve closed
7/11/2011	1:03:31 PM	BCl3 valve closed
7/11/2011	1:03:31 PM	PH3 valve closed
7/11/2011	1:03:31 PM	SiCl4 pre valve closed
7/11/2011	1:03:31 PM	SiCl4 post valve closed
7/11/2011	1:03:31 PM	Main Vac valve closed
7/11/2011	1:03:31 PM	Bubbler valve closed
7/11/2011	1:03:31 PM	Bypass valve opened
7/11/2011	1:03:31 PM	Helium MFC set to  0.000000
7/11/2011	1:03:31 PM	H2 MFC set to  0.000000
7/11/2011	1:03:31 PM	BCl3 MFC set to  0.000000
7/11/2011	1:03:31 PM	PHl3 MFC set to  0.000000
7/11/2011	1:03:31 PM	SiCl4 MFC set to  0.000000
7/11/2011	1:03:31 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	1:03:31 PM	Tube furnace set to 0
7/11/2011	1:04:12 PM	Helium valve closed
7/11/2011	1:04:12 PM	H2 valve closed
7/11/2011	1:04:12 PM	BCl3 valve closed
7/11/2011	1:04:12 PM	PH3 valve closed
7/11/2011	1:04:12 PM	SiCl4 pre valve closed
7/11/2011	1:04:12 PM	SiCl4 post valve closed
7/11/2011	1:04:12 PM	Main Vac valve closed
7/11/2011	1:04:12 PM	Bubbler valve closed
7/11/2011	1:04:12 PM	Bypass valve opened
7/11/2011	1:04:12 PM	Helium MFC set to  0.000000
7/11/2011	1:04:12 PM	H2 MFC set to  0.000000
7/11/2011	1:04:12 PM	BCl3 MFC set to  0.000000
7/11/2011	1:04:12 PM	PHl3 MFC set to  0.000000
7/11/2011	1:04:12 PM	SiCl4 MFC set to  0.000000
7/11/2011	1:04:12 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	1:04:12 PM	Tube furnace set to 0
7/11/2011	1:05:12 PM	Helium valve closed
7/11/2011	1:05:12 PM	H2 valve closed
7/11/2011	1:05:12 PM	BCl3 valve closed
7/11/2011	1:05:12 PM	PH3 valve closed
7/11/2011	1:05:12 PM	SiCl4 pre valve closed
7/11/2011	1:05:12 PM	SiCl4 post valve closed
7/11/2011	1:05:12 PM	Bypass valve closed
7/11/2011	1:05:12 PM	Bubbler valve closed
7/11/2011	1:05:12 PM	Main Vac valve opened
7/11/2011	1:05:12 PM	Helium MFC set to  0.000000
7/11/2011	1:05:12 PM	H2 MFC set to  0.000000
7/11/2011	1:05:12 PM	BCl3 MFC set to  0.000000
7/11/2011	1:05:12 PM	PHl3 MFC set to  0.000000
7/11/2011	1:05:12 PM	SiCl4 MFC set to  0.000000
7/11/2011	1:05:12 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	1:05:12 PM	Tube furnace set to 0
7/11/2011	1:05:13 PM	Run finished at 1:05 PM
7/11/2011	1:05:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2011	1:18:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/11/2011	1:18:52 PM	Recipe started at 1:18 PM
7/11/2011	1:18:52 PM	H2 valve closed
7/11/2011	1:18:52 PM	BCl3 valve closed
7/11/2011	1:18:52 PM	PH3 valve closed
7/11/2011	1:18:52 PM	SiCl4 pre valve closed
7/11/2011	1:18:52 PM	SiCl4 post valve closed
7/11/2011	1:18:52 PM	Main Vac valve closed
7/11/2011	1:18:52 PM	Bypass valve closed
7/11/2011	1:18:52 PM	Bubbler valve closed
7/11/2011	1:18:52 PM	Helium valve opened
7/11/2011	1:18:52 PM	Helium MFC set to  500.000000
7/11/2011	1:18:52 PM	H2 MFC set to  0.000000
7/11/2011	1:18:52 PM	BCl3 MFC set to  0.000000
7/11/2011	1:18:52 PM	PHl3 MFC set to  0.000000
7/11/2011	1:18:52 PM	SiCl4 MFC set to  0.000000
7/11/2011	1:18:52 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	1:18:52 PM	Tube furnace set to 0
7/11/2011	1:19:58 PM	Helium valve closed
7/11/2011	1:19:58 PM	H2 valve closed
7/11/2011	1:19:58 PM	BCl3 valve closed
7/11/2011	1:19:58 PM	PH3 valve closed
7/11/2011	1:19:58 PM	SiCl4 pre valve closed
7/11/2011	1:19:58 PM	SiCl4 post valve closed
7/11/2011	1:19:58 PM	Main Vac valve closed
7/11/2011	1:19:58 PM	Bypass valve closed
7/11/2011	1:19:58 PM	Bubbler valve closed
7/11/2011	1:19:58 PM	Helium MFC set to  0.000000
7/11/2011	1:19:58 PM	H2 MFC set to  0.000000
7/11/2011	1:19:58 PM	BCl3 MFC set to  0.000000
7/11/2011	1:19:58 PM	PHl3 MFC set to  0.000000
7/11/2011	1:19:58 PM	SiCl4 MFC set to  0.000000
7/11/2011	1:19:58 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	1:19:58 PM	Tube furnace set to 0
7/11/2011	1:19:59 PM	Run finished at 1:19 PM
7/11/2011	1:19:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/11/2011	1:20:05 PM	Helium MFC set to  50.000000
7/11/2011	1:20:06 PM	Helium valve opened
7/11/2011	1:20:15 PM	Helium MFC set to  100.000000
7/11/2011	1:21:10 PM	Helium valve closed
7/11/2011	1:21:37 PM	Bypass valve opened
7/11/2011	1:21:54 PM	Bypass valve closed
7/11/2011	1:21:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/11/2011	1:21:56 PM	Recipe started at 1:21 PM
7/11/2011	1:21:56 PM	H2 valve closed
7/11/2011	1:21:56 PM	BCl3 valve closed
7/11/2011	1:21:56 PM	PH3 valve closed
7/11/2011	1:21:56 PM	SiCl4 pre valve closed
7/11/2011	1:21:56 PM	SiCl4 post valve closed
7/11/2011	1:21:56 PM	Main Vac valve closed
7/11/2011	1:21:56 PM	Bypass valve closed
7/11/2011	1:21:56 PM	Bubbler valve closed
7/11/2011	1:21:56 PM	Helium valve opened
7/11/2011	1:21:56 PM	Helium MFC set to  500.000000
7/11/2011	1:21:56 PM	H2 MFC set to  0.000000
7/11/2011	1:21:56 PM	BCl3 MFC set to  0.000000
7/11/2011	1:21:56 PM	PHl3 MFC set to  0.000000
7/11/2011	1:21:56 PM	SiCl4 MFC set to  0.000000
7/11/2011	1:21:56 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	1:21:56 PM	Tube furnace set to 0
7/11/2011	1:22:58 PM	Helium valve closed
7/11/2011	1:22:58 PM	H2 valve closed
7/11/2011	1:22:58 PM	BCl3 valve closed
7/11/2011	1:22:58 PM	PH3 valve closed
7/11/2011	1:22:58 PM	SiCl4 pre valve closed
7/11/2011	1:22:58 PM	SiCl4 post valve closed
7/11/2011	1:22:58 PM	Main Vac valve closed
7/11/2011	1:22:58 PM	Bypass valve closed
7/11/2011	1:22:58 PM	Bubbler valve closed
7/11/2011	1:22:58 PM	Helium MFC set to  0.000000
7/11/2011	1:22:58 PM	H2 MFC set to  0.000000
7/11/2011	1:22:58 PM	BCl3 MFC set to  0.000000
7/11/2011	1:22:58 PM	PHl3 MFC set to  0.000000
7/11/2011	1:22:58 PM	SiCl4 MFC set to  0.000000
7/11/2011	1:22:58 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	1:22:58 PM	Tube furnace set to 0
7/11/2011	1:22:59 PM	Run finished at 1:22 PM
7/11/2011	1:22:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/11/2011	1:23:08 PM	Helium MFC set to  500.000000
7/11/2011	1:23:10 PM	Helium valve opened
7/11/2011	1:23:12 PM	Bubbler valve opened
7/11/2011	1:24:30 PM	Bubbler valve closed
7/11/2011	1:24:30 PM	Helium valve closed
7/11/2011	1:24:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2011	1:24:40 PM	Recipe started at 1:24 PM
7/11/2011	1:24:40 PM	Helium valve closed
7/11/2011	1:24:40 PM	H2 valve closed
7/11/2011	1:24:40 PM	BCl3 valve closed
7/11/2011	1:24:40 PM	PH3 valve closed
7/11/2011	1:24:40 PM	SiCl4 pre valve closed
7/11/2011	1:24:40 PM	SiCl4 post valve closed
7/11/2011	1:24:40 PM	Main Vac valve closed
7/11/2011	1:24:40 PM	Bubbler valve closed
7/11/2011	1:24:40 PM	Bypass valve opened
7/11/2011	1:24:40 PM	Helium MFC set to  0.000000
7/11/2011	1:24:40 PM	H2 MFC set to  0.000000
7/11/2011	1:24:40 PM	BCl3 MFC set to  0.000000
7/11/2011	1:24:40 PM	PHl3 MFC set to  0.000000
7/11/2011	1:24:40 PM	SiCl4 MFC set to  0.000000
7/11/2011	1:24:40 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	1:24:40 PM	Tube furnace set to 0
7/11/2011	1:25:34 PM	Helium valve closed
7/11/2011	1:25:34 PM	H2 valve closed
7/11/2011	1:25:34 PM	BCl3 valve closed
7/11/2011	1:25:34 PM	PH3 valve closed
7/11/2011	1:25:34 PM	SiCl4 pre valve closed
7/11/2011	1:25:34 PM	SiCl4 post valve closed
7/11/2011	1:25:34 PM	Main Vac valve closed
7/11/2011	1:25:34 PM	Bubbler valve closed
7/11/2011	1:25:34 PM	Bypass valve opened
7/11/2011	1:25:34 PM	Helium MFC set to  0.000000
7/11/2011	1:25:34 PM	H2 MFC set to  0.000000
7/11/2011	1:25:34 PM	BCl3 MFC set to  0.000000
7/11/2011	1:25:34 PM	PHl3 MFC set to  0.000000
7/11/2011	1:25:34 PM	SiCl4 MFC set to  0.000000
7/11/2011	1:25:34 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	1:25:34 PM	Tube furnace set to 0
7/11/2011	1:26:23 PM	Run aborted at 1:26 PM
7/11/2011	1:26:23 PM	Helium valve closed
7/11/2011	1:26:23 PM	H2 valve closed
7/11/2011	1:26:23 PM	BCl3 valve closed
7/11/2011	1:26:23 PM	PH3 valve closed
7/11/2011	1:26:23 PM	SiCl4 pre valve closed
7/11/2011	1:26:23 PM	SiCl4 post valve closed
7/11/2011	1:26:23 PM	Bypass valve closed
7/11/2011	1:26:23 PM	Main Vac valve closed
7/11/2011	1:26:23 PM	Bubbler valve closed
7/11/2011	1:26:23 PM	Helium MFC set to  0.000000
7/11/2011	1:26:23 PM	H2 MFC set to  0.000000
7/11/2011	1:26:23 PM	BCl3 MFC set to  0.000000
7/11/2011	1:26:23 PM	PHl3 MFC set to  0.000000
7/11/2011	1:26:23 PM	SiCl4 MFC set to  0.000000
7/11/2011	1:26:23 PM	Tube furnace set to 0
7/11/2011	1:26:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2011	1:26:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2011	1:26:28 PM	Recipe started at 1:26 PM
7/11/2011	1:26:28 PM	Helium valve closed
7/11/2011	1:26:28 PM	H2 valve closed
7/11/2011	1:26:28 PM	BCl3 valve closed
7/11/2011	1:26:28 PM	PH3 valve closed
7/11/2011	1:26:28 PM	SiCl4 pre valve closed
7/11/2011	1:26:28 PM	SiCl4 post valve closed
7/11/2011	1:26:28 PM	Main Vac valve closed
7/11/2011	1:26:28 PM	Bubbler valve closed
7/11/2011	1:26:28 PM	Bypass valve opened
7/11/2011	1:26:28 PM	Helium MFC set to  0.000000
7/11/2011	1:26:28 PM	H2 MFC set to  0.000000
7/11/2011	1:26:28 PM	BCl3 MFC set to  0.000000
7/11/2011	1:26:28 PM	PHl3 MFC set to  0.000000
7/11/2011	1:26:28 PM	SiCl4 MFC set to  0.000000
7/11/2011	1:26:28 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	1:26:29 PM	Tube furnace set to 0
7/11/2011	1:26:29 PM	Helium valve closed
7/11/2011	1:26:29 PM	H2 valve closed
7/11/2011	1:26:29 PM	BCl3 valve closed
7/11/2011	1:26:29 PM	PH3 valve closed
7/11/2011	1:26:29 PM	SiCl4 pre valve closed
7/11/2011	1:26:29 PM	SiCl4 post valve closed
7/11/2011	1:26:29 PM	Main Vac valve closed
7/11/2011	1:26:29 PM	Bubbler valve closed
7/11/2011	1:26:29 PM	Bypass valve opened
7/11/2011	1:26:29 PM	Helium MFC set to  0.000000
7/11/2011	1:26:29 PM	H2 MFC set to  0.000000
7/11/2011	1:26:29 PM	BCl3 MFC set to  0.000000
7/11/2011	1:26:29 PM	PHl3 MFC set to  0.000000
7/11/2011	1:26:29 PM	SiCl4 MFC set to  0.000000
7/11/2011	1:26:29 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	1:26:29 PM	Tube furnace set to 0
7/11/2011	1:26:36 PM	Helium valve closed
7/11/2011	1:26:36 PM	H2 valve closed
7/11/2011	1:26:36 PM	BCl3 valve closed
7/11/2011	1:26:36 PM	PH3 valve closed
7/11/2011	1:26:36 PM	SiCl4 pre valve closed
7/11/2011	1:26:36 PM	SiCl4 post valve closed
7/11/2011	1:26:36 PM	Bypass valve closed
7/11/2011	1:26:36 PM	Bubbler valve closed
7/11/2011	1:26:36 PM	Main Vac valve opened
7/11/2011	1:26:36 PM	Helium MFC set to  0.000000
7/11/2011	1:26:36 PM	H2 MFC set to  0.000000
7/11/2011	1:26:36 PM	BCl3 MFC set to  0.000000
7/11/2011	1:26:36 PM	PHl3 MFC set to  0.000000
7/11/2011	1:26:36 PM	SiCl4 MFC set to  0.000000
7/11/2011	1:26:36 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	1:26:36 PM	Tube furnace set to 0
7/11/2011	1:26:37 PM	Run finished at 1:26 PM
7/11/2011	1:26:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2011	3:29:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/11/2011	3:29:35 PM	Recipe started at 3:29 PM
7/11/2011	3:29:35 PM	H2 valve closed
7/11/2011	3:29:35 PM	BCl3 valve closed
7/11/2011	3:29:35 PM	PH3 valve closed
7/11/2011	3:29:35 PM	SiCl4 pre valve closed
7/11/2011	3:29:35 PM	SiCl4 post valve closed
7/11/2011	3:29:35 PM	Main Vac valve closed
7/11/2011	3:29:35 PM	Bypass valve closed
7/11/2011	3:29:35 PM	Bubbler valve closed
7/11/2011	3:29:35 PM	Helium valve opened
7/11/2011	3:29:35 PM	Helium MFC set to  500.000000
7/11/2011	3:29:35 PM	H2 MFC set to  0.000000
7/11/2011	3:29:35 PM	BCl3 MFC set to  0.000000
7/11/2011	3:29:35 PM	PHl3 MFC set to  0.000000
7/11/2011	3:29:35 PM	SiCl4 MFC set to  0.000000
7/11/2011	3:29:35 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	3:29:36 PM	Tube furnace set to 0
7/11/2011	3:30:42 PM	Helium valve closed
7/11/2011	3:30:42 PM	H2 valve closed
7/11/2011	3:30:42 PM	BCl3 valve closed
7/11/2011	3:30:42 PM	PH3 valve closed
7/11/2011	3:30:42 PM	SiCl4 pre valve closed
7/11/2011	3:30:42 PM	SiCl4 post valve closed
7/11/2011	3:30:42 PM	Main Vac valve closed
7/11/2011	3:30:42 PM	Bypass valve closed
7/11/2011	3:30:42 PM	Bubbler valve closed
7/11/2011	3:30:42 PM	Helium MFC set to  0.000000
7/11/2011	3:30:42 PM	H2 MFC set to  0.000000
7/11/2011	3:30:42 PM	BCl3 MFC set to  0.000000
7/11/2011	3:30:42 PM	PHl3 MFC set to  0.000000
7/11/2011	3:30:42 PM	SiCl4 MFC set to  0.000000
7/11/2011	3:30:42 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	3:30:42 PM	Tube furnace set to 0
7/11/2011	3:30:43 PM	Run finished at 3:30 PM
7/11/2011	3:30:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/11/2011	3:35:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2011	3:35:34 PM	Recipe started at 3:35 PM
7/11/2011	3:35:34 PM	Helium valve closed
7/11/2011	3:35:34 PM	H2 valve closed
7/11/2011	3:35:34 PM	BCl3 valve closed
7/11/2011	3:35:34 PM	PH3 valve closed
7/11/2011	3:35:34 PM	SiCl4 pre valve closed
7/11/2011	3:35:34 PM	SiCl4 post valve closed
7/11/2011	3:35:34 PM	Main Vac valve closed
7/11/2011	3:35:34 PM	Bubbler valve closed
7/11/2011	3:35:34 PM	Bypass valve opened
7/11/2011	3:35:34 PM	Helium MFC set to  0.000000
7/11/2011	3:35:34 PM	H2 MFC set to  0.000000
7/11/2011	3:35:34 PM	BCl3 MFC set to  0.000000
7/11/2011	3:35:34 PM	PHl3 MFC set to  0.000000
7/11/2011	3:35:34 PM	SiCl4 MFC set to  0.000000
7/11/2011	3:35:34 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	3:35:34 PM	Tube furnace set to 0
7/11/2011	3:36:36 PM	Helium valve closed
7/11/2011	3:36:36 PM	H2 valve closed
7/11/2011	3:36:36 PM	BCl3 valve closed
7/11/2011	3:36:36 PM	PH3 valve closed
7/11/2011	3:36:36 PM	SiCl4 pre valve closed
7/11/2011	3:36:36 PM	SiCl4 post valve closed
7/11/2011	3:36:36 PM	Main Vac valve closed
7/11/2011	3:36:36 PM	Bubbler valve closed
7/11/2011	3:36:36 PM	Bypass valve opened
7/11/2011	3:36:36 PM	Helium MFC set to  0.000000
7/11/2011	3:36:36 PM	H2 MFC set to  0.000000
7/11/2011	3:36:36 PM	BCl3 MFC set to  0.000000
7/11/2011	3:36:36 PM	PHl3 MFC set to  0.000000
7/11/2011	3:36:36 PM	SiCl4 MFC set to  0.000000
7/11/2011	3:36:36 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	3:36:36 PM	Tube furnace set to 0
7/11/2011	3:37:36 PM	Helium valve closed
7/11/2011	3:37:36 PM	H2 valve closed
7/11/2011	3:37:36 PM	BCl3 valve closed
7/11/2011	3:37:36 PM	PH3 valve closed
7/11/2011	3:37:36 PM	SiCl4 pre valve closed
7/11/2011	3:37:36 PM	SiCl4 post valve closed
7/11/2011	3:37:36 PM	Bypass valve closed
7/11/2011	3:37:36 PM	Bubbler valve closed
7/11/2011	3:37:36 PM	Main Vac valve opened
7/11/2011	3:37:36 PM	Helium MFC set to  0.000000
7/11/2011	3:37:36 PM	H2 MFC set to  0.000000
7/11/2011	3:37:36 PM	BCl3 MFC set to  0.000000
7/11/2011	3:37:36 PM	PHl3 MFC set to  0.000000
7/11/2011	3:37:36 PM	SiCl4 MFC set to  0.000000
7/11/2011	3:37:36 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	3:37:36 PM	Tube furnace set to 0
7/11/2011	3:37:37 PM	Run finished at 3:37 PM
7/11/2011	3:37:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2011	4:00:45 PM	Recipe started at 4:00 PM
7/11/2011	4:00:45 PM	Helium valve closed
7/11/2011	4:00:45 PM	H2 valve closed
7/11/2011	4:00:45 PM	BCl3 valve closed
7/11/2011	4:00:45 PM	PH3 valve closed
7/11/2011	4:00:45 PM	SiCl4 pre valve closed
7/11/2011	4:00:45 PM	SiCl4 post valve closed
7/11/2011	4:00:45 PM	Main Vac valve closed
7/11/2011	4:00:45 PM	Bypass valve closed
7/11/2011	4:00:45 PM	Bubbler valve closed
7/11/2011	4:00:45 PM	Helium MFC set to  0.000000
7/11/2011	4:00:45 PM	H2 MFC set to  0.000000
7/11/2011	4:00:45 PM	BCl3 MFC set to  0.000000
7/11/2011	4:00:45 PM	PHl3 MFC set to  0.000000
7/11/2011	4:00:45 PM	SiCl4 MFC set to  0.000000
7/11/2011	4:00:45 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	4:00:45 PM	Tube furnace set to 0
7/11/2011	4:00:48 PM	Helium valve closed
7/11/2011	4:00:48 PM	BCl3 valve closed
7/11/2011	4:00:48 PM	PH3 valve closed
7/11/2011	4:00:48 PM	SiCl4 pre valve closed
7/11/2011	4:00:48 PM	SiCl4 post valve closed
7/11/2011	4:00:48 PM	Main Vac valve closed
7/11/2011	4:00:48 PM	Bypass valve closed
7/11/2011	4:00:48 PM	Bubbler valve closed
7/11/2011	4:00:48 PM	H2 valve opened
7/11/2011	4:00:48 PM	Helium MFC set to  0.000000
7/11/2011	4:00:48 PM	H2 MFC set to  500.000000
7/11/2011	4:00:48 PM	BCl3 MFC set to  0.000000
7/11/2011	4:00:48 PM	PHl3 MFC set to  0.000000
7/11/2011	4:00:48 PM	SiCl4 MFC set to  0.000000
7/11/2011	4:00:48 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	4:00:49 PM	Tube furnace set to 0
7/11/2011	4:01:55 PM	Helium valve closed
7/11/2011	4:01:55 PM	BCl3 valve closed
7/11/2011	4:01:55 PM	PH3 valve closed
7/11/2011	4:01:55 PM	SiCl4 pre valve closed
7/11/2011	4:01:55 PM	SiCl4 post valve closed
7/11/2011	4:01:55 PM	Main Vac valve closed
7/11/2011	4:01:55 PM	Bypass valve closed
7/11/2011	4:01:55 PM	H2 valve opened
7/11/2011	4:01:55 PM	Bubbler valve opened
7/11/2011	4:01:55 PM	Helium MFC set to  0.000000
7/11/2011	4:01:55 PM	H2 MFC set to  500.000000
7/11/2011	4:01:55 PM	BCl3 MFC set to  0.000000
7/11/2011	4:01:55 PM	PHl3 MFC set to  0.000000
7/11/2011	4:01:55 PM	SiCl4 MFC set to  0.000000
7/11/2011	4:01:55 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	4:01:55 PM	Tube furnace set to 0
7/11/2011	4:01:56 PM	Helium valve closed
7/11/2011	4:01:56 PM	BCl3 valve closed
7/11/2011	4:01:56 PM	PH3 valve closed
7/11/2011	4:01:56 PM	SiCl4 pre valve closed
7/11/2011	4:01:56 PM	SiCl4 post valve closed
7/11/2011	4:01:56 PM	Main Vac valve closed
7/11/2011	4:01:56 PM	Bypass valve closed
7/11/2011	4:01:56 PM	H2 valve opened
7/11/2011	4:01:56 PM	Bubbler valve opened
7/11/2011	4:01:56 PM	Helium MFC set to  0.000000
7/11/2011	4:01:56 PM	H2 MFC set to  500.000000
7/11/2011	4:01:56 PM	BCl3 MFC set to  0.000000
7/11/2011	4:01:56 PM	PHl3 MFC set to  0.000000
7/11/2011	4:01:56 PM	SiCl4 MFC set to  0.000000
7/11/2011	4:01:56 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	4:01:56 PM	Tube furnace set to 1000
7/11/2011	4:21:56 PM	Helium valve closed
7/11/2011	4:21:56 PM	PH3 valve closed
7/11/2011	4:21:56 PM	Main Vac valve closed
7/11/2011	4:21:56 PM	Bypass valve closed
7/11/2011	4:21:56 PM	H2 valve opened
7/11/2011	4:21:56 PM	BCl3 valve opened
7/11/2011	4:21:56 PM	SiCl4 pre valve opened
7/11/2011	4:21:56 PM	SiCl4 post valve opened
7/11/2011	4:21:56 PM	Bubbler valve opened
7/11/2011	4:21:56 PM	Helium MFC set to  0.000000
7/11/2011	4:21:56 PM	H2 MFC set to  500.000000
7/11/2011	4:21:56 PM	BCl3 MFC set to  3.000000
7/11/2011	4:21:56 PM	PHl3 MFC set to  0.000000
7/11/2011	4:21:56 PM	SiCl4 MFC set to  50.000000
7/11/2011	4:21:56 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	4:21:56 PM	Tube furnace set to 1000
7/11/2011	4:23:56 PM	Helium valve closed
7/11/2011	4:23:56 PM	BCl3 valve closed
7/11/2011	4:23:56 PM	PH3 valve closed
7/11/2011	4:23:56 PM	SiCl4 pre valve closed
7/11/2011	4:23:56 PM	SiCl4 post valve closed
7/11/2011	4:23:56 PM	Main Vac valve closed
7/11/2011	4:23:56 PM	Bypass valve closed
7/11/2011	4:23:56 PM	H2 valve opened
7/11/2011	4:23:56 PM	Bubbler valve opened
7/11/2011	4:23:56 PM	Helium MFC set to  0.000000
7/11/2011	4:23:56 PM	H2 MFC set to  500.000000
7/11/2011	4:23:56 PM	BCl3 MFC set to  0.000000
7/11/2011	4:23:56 PM	PHl3 MFC set to  0.000000
7/11/2011	4:23:56 PM	SiCl4 MFC set to  0.000000
7/11/2011	4:23:56 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	4:23:57 PM	Tube furnace set to 750
7/11/2011	4:28:57 PM	H2 valve closed
7/11/2011	4:28:57 PM	BCl3 valve closed
7/11/2011	4:28:57 PM	PH3 valve closed
7/11/2011	4:28:57 PM	SiCl4 pre valve closed
7/11/2011	4:28:57 PM	SiCl4 post valve closed
7/11/2011	4:28:57 PM	Main Vac valve closed
7/11/2011	4:28:57 PM	Bypass valve closed
7/11/2011	4:28:57 PM	Helium valve opened
7/11/2011	4:28:57 PM	Bubbler valve opened
7/11/2011	4:28:57 PM	Helium MFC set to  500.000000
7/11/2011	4:28:57 PM	H2 MFC set to  0.000000
7/11/2011	4:28:57 PM	BCl3 MFC set to  0.000000
7/11/2011	4:28:57 PM	PHl3 MFC set to  0.000000
7/11/2011	4:28:57 PM	SiCl4 MFC set to  0.000000
7/11/2011	4:28:57 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	4:28:57 PM	Tube furnace set to 0
7/11/2011	4:47:53 PM	Helium valve closed
7/11/2011	4:47:53 PM	H2 valve closed
7/11/2011	4:47:53 PM	BCl3 valve closed
7/11/2011	4:47:53 PM	PH3 valve closed
7/11/2011	4:47:53 PM	SiCl4 pre valve closed
7/11/2011	4:47:53 PM	SiCl4 post valve closed
7/11/2011	4:47:53 PM	Main Vac valve closed
7/11/2011	4:47:53 PM	Bypass valve closed
7/11/2011	4:47:53 PM	Bubbler valve closed
7/11/2011	4:47:53 PM	Helium MFC set to  0.000000
7/11/2011	4:47:53 PM	H2 MFC set to  0.000000
7/11/2011	4:47:53 PM	BCl3 MFC set to  0.000000
7/11/2011	4:47:53 PM	PHl3 MFC set to  0.000000
7/11/2011	4:47:53 PM	SiCl4 MFC set to  0.000000
7/11/2011	4:47:53 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	4:47:53 PM	Tube furnace set to 0
7/11/2011	4:47:54 PM	Run finished at 4:47 PM
7/11/2011	4:54:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2011	4:54:37 PM	Recipe started at 4:54 PM
7/11/2011	4:54:37 PM	Helium valve closed
7/11/2011	4:54:37 PM	H2 valve closed
7/11/2011	4:54:37 PM	BCl3 valve closed
7/11/2011	4:54:37 PM	PH3 valve closed
7/11/2011	4:54:37 PM	SiCl4 pre valve closed
7/11/2011	4:54:37 PM	SiCl4 post valve closed
7/11/2011	4:54:37 PM	Main Vac valve closed
7/11/2011	4:54:37 PM	Bubbler valve closed
7/11/2011	4:54:37 PM	Bypass valve opened
7/11/2011	4:54:37 PM	Helium MFC set to  0.000000
7/11/2011	4:54:37 PM	H2 MFC set to  0.000000
7/11/2011	4:54:37 PM	BCl3 MFC set to  0.000000
7/11/2011	4:54:37 PM	PHl3 MFC set to  0.000000
7/11/2011	4:54:37 PM	SiCl4 MFC set to  0.000000
7/11/2011	4:54:37 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	4:54:37 PM	Tube furnace set to 0
7/11/2011	4:55:38 PM	Helium valve closed
7/11/2011	4:55:38 PM	H2 valve closed
7/11/2011	4:55:38 PM	BCl3 valve closed
7/11/2011	4:55:38 PM	PH3 valve closed
7/11/2011	4:55:38 PM	SiCl4 pre valve closed
7/11/2011	4:55:38 PM	SiCl4 post valve closed
7/11/2011	4:55:38 PM	Main Vac valve closed
7/11/2011	4:55:38 PM	Bubbler valve closed
7/11/2011	4:55:38 PM	Bypass valve opened
7/11/2011	4:55:38 PM	Helium MFC set to  0.000000
7/11/2011	4:55:38 PM	H2 MFC set to  0.000000
7/11/2011	4:55:38 PM	BCl3 MFC set to  0.000000
7/11/2011	4:55:38 PM	PHl3 MFC set to  0.000000
7/11/2011	4:55:38 PM	SiCl4 MFC set to  0.000000
7/11/2011	4:55:38 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	4:55:38 PM	Tube furnace set to 0
7/11/2011	4:56:38 PM	Helium valve closed
7/11/2011	4:56:38 PM	H2 valve closed
7/11/2011	4:56:38 PM	BCl3 valve closed
7/11/2011	4:56:38 PM	PH3 valve closed
7/11/2011	4:56:38 PM	SiCl4 pre valve closed
7/11/2011	4:56:38 PM	SiCl4 post valve closed
7/11/2011	4:56:38 PM	Bypass valve closed
7/11/2011	4:56:38 PM	Bubbler valve closed
7/11/2011	4:56:38 PM	Main Vac valve opened
7/11/2011	4:56:38 PM	Helium MFC set to  0.000000
7/11/2011	4:56:38 PM	H2 MFC set to  0.000000
7/11/2011	4:56:38 PM	BCl3 MFC set to  0.000000
7/11/2011	4:56:38 PM	PHl3 MFC set to  0.000000
7/11/2011	4:56:38 PM	SiCl4 MFC set to  0.000000
7/11/2011	4:56:38 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	4:56:38 PM	Tube furnace set to 0
7/11/2011	4:56:39 PM	Run finished at 4:56 PM
7/11/2011	4:56:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2011	5:33:01 PM	Recipe started at 5:33 PM
7/11/2011	5:33:01 PM	Helium valve closed
7/11/2011	5:33:01 PM	H2 valve closed
7/11/2011	5:33:01 PM	BCl3 valve closed
7/11/2011	5:33:01 PM	PH3 valve closed
7/11/2011	5:33:01 PM	SiCl4 pre valve closed
7/11/2011	5:33:01 PM	SiCl4 post valve closed
7/11/2011	5:33:01 PM	Main Vac valve closed
7/11/2011	5:33:01 PM	Bypass valve closed
7/11/2011	5:33:01 PM	Bubbler valve closed
7/11/2011	5:33:01 PM	Helium MFC set to  0.000000
7/11/2011	5:33:01 PM	H2 MFC set to  0.000000
7/11/2011	5:33:01 PM	BCl3 MFC set to  0.000000
7/11/2011	5:33:01 PM	PHl3 MFC set to  0.000000
7/11/2011	5:33:01 PM	SiCl4 MFC set to  0.000000
7/11/2011	5:33:01 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	5:33:02 PM	Tube furnace set to 0
7/11/2011	5:33:05 PM	Helium valve closed
7/11/2011	5:33:05 PM	BCl3 valve closed
7/11/2011	5:33:05 PM	PH3 valve closed
7/11/2011	5:33:05 PM	SiCl4 pre valve closed
7/11/2011	5:33:05 PM	SiCl4 post valve closed
7/11/2011	5:33:05 PM	Main Vac valve closed
7/11/2011	5:33:05 PM	Bypass valve closed
7/11/2011	5:33:05 PM	Bubbler valve closed
7/11/2011	5:33:05 PM	H2 valve opened
7/11/2011	5:33:05 PM	Helium MFC set to  0.000000
7/11/2011	5:33:05 PM	H2 MFC set to  500.000000
7/11/2011	5:33:05 PM	BCl3 MFC set to  0.000000
7/11/2011	5:33:05 PM	PHl3 MFC set to  0.000000
7/11/2011	5:33:05 PM	SiCl4 MFC set to  0.000000
7/11/2011	5:33:05 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	5:33:05 PM	Tube furnace set to 0
7/11/2011	5:34:09 PM	Helium valve closed
7/11/2011	5:34:09 PM	BCl3 valve closed
7/11/2011	5:34:09 PM	PH3 valve closed
7/11/2011	5:34:09 PM	SiCl4 pre valve closed
7/11/2011	5:34:09 PM	SiCl4 post valve closed
7/11/2011	5:34:09 PM	Main Vac valve closed
7/11/2011	5:34:09 PM	Bypass valve closed
7/11/2011	5:34:09 PM	H2 valve opened
7/11/2011	5:34:09 PM	Bubbler valve opened
7/11/2011	5:34:09 PM	Helium MFC set to  0.000000
7/11/2011	5:34:09 PM	H2 MFC set to  500.000000
7/11/2011	5:34:09 PM	BCl3 MFC set to  0.000000
7/11/2011	5:34:09 PM	PHl3 MFC set to  0.000000
7/11/2011	5:34:09 PM	SiCl4 MFC set to  0.000000
7/11/2011	5:34:09 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	5:34:09 PM	Tube furnace set to 0
7/11/2011	5:34:10 PM	Helium valve closed
7/11/2011	5:34:10 PM	BCl3 valve closed
7/11/2011	5:34:10 PM	PH3 valve closed
7/11/2011	5:34:10 PM	SiCl4 pre valve closed
7/11/2011	5:34:10 PM	SiCl4 post valve closed
7/11/2011	5:34:10 PM	Main Vac valve closed
7/11/2011	5:34:10 PM	Bypass valve closed
7/11/2011	5:34:10 PM	H2 valve opened
7/11/2011	5:34:10 PM	Bubbler valve opened
7/11/2011	5:34:10 PM	Helium MFC set to  0.000000
7/11/2011	5:34:10 PM	H2 MFC set to  500.000000
7/11/2011	5:34:10 PM	BCl3 MFC set to  0.000000
7/11/2011	5:34:10 PM	PHl3 MFC set to  0.000000
7/11/2011	5:34:10 PM	SiCl4 MFC set to  0.000000
7/11/2011	5:34:10 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	5:34:10 PM	Tube furnace set to 1000
7/11/2011	5:54:10 PM	Helium valve closed
7/11/2011	5:54:10 PM	PH3 valve closed
7/11/2011	5:54:10 PM	Main Vac valve closed
7/11/2011	5:54:10 PM	Bypass valve closed
7/11/2011	5:54:10 PM	H2 valve opened
7/11/2011	5:54:10 PM	BCl3 valve opened
7/11/2011	5:54:10 PM	SiCl4 pre valve opened
7/11/2011	5:54:10 PM	SiCl4 post valve opened
7/11/2011	5:54:10 PM	Bubbler valve opened
7/11/2011	5:54:10 PM	Helium MFC set to  0.000000
7/11/2011	5:54:10 PM	H2 MFC set to  500.000000
7/11/2011	5:54:10 PM	BCl3 MFC set to  3.000000
7/11/2011	5:54:10 PM	PHl3 MFC set to  0.000000
7/11/2011	5:54:10 PM	SiCl4 MFC set to  50.000000
7/11/2011	5:54:10 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	5:54:10 PM	Tube furnace set to 1000
7/11/2011	6:09:10 PM	Helium valve closed
7/11/2011	6:09:10 PM	BCl3 valve closed
7/11/2011	6:09:10 PM	PH3 valve closed
7/11/2011	6:09:10 PM	SiCl4 pre valve closed
7/11/2011	6:09:11 PM	SiCl4 post valve closed
7/11/2011	6:09:11 PM	Main Vac valve closed
7/11/2011	6:09:11 PM	Bypass valve closed
7/11/2011	6:09:11 PM	H2 valve opened
7/11/2011	6:09:11 PM	Bubbler valve opened
7/11/2011	6:09:11 PM	Helium MFC set to  0.000000
7/11/2011	6:09:11 PM	H2 MFC set to  500.000000
7/11/2011	6:09:11 PM	BCl3 MFC set to  0.000000
7/11/2011	6:09:11 PM	PHl3 MFC set to  0.000000
7/11/2011	6:09:11 PM	SiCl4 MFC set to  0.000000
7/11/2011	6:09:11 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	6:09:11 PM	Tube furnace set to 750
7/11/2011	6:14:11 PM	H2 valve closed
7/11/2011	6:14:11 PM	BCl3 valve closed
7/11/2011	6:14:11 PM	PH3 valve closed
7/11/2011	6:14:11 PM	SiCl4 pre valve closed
7/11/2011	6:14:11 PM	SiCl4 post valve closed
7/11/2011	6:14:11 PM	Main Vac valve closed
7/11/2011	6:14:11 PM	Bypass valve closed
7/11/2011	6:14:11 PM	Helium valve opened
7/11/2011	6:14:11 PM	Bubbler valve opened
7/11/2011	6:14:11 PM	Helium MFC set to  500.000000
7/11/2011	6:14:11 PM	H2 MFC set to  0.000000
7/11/2011	6:14:11 PM	BCl3 MFC set to  0.000000
7/11/2011	6:14:11 PM	PHl3 MFC set to  0.000000
7/11/2011	6:14:11 PM	SiCl4 MFC set to  0.000000
7/11/2011	6:14:11 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	6:14:11 PM	Tube furnace set to 0
7/11/2011	6:34:11 PM	Helium valve closed
7/11/2011	6:34:11 PM	H2 valve closed
7/11/2011	6:34:11 PM	BCl3 valve closed
7/11/2011	6:34:11 PM	PH3 valve closed
7/11/2011	6:34:11 PM	SiCl4 pre valve closed
7/11/2011	6:34:11 PM	SiCl4 post valve closed
7/11/2011	6:34:11 PM	Main Vac valve closed
7/11/2011	6:34:11 PM	Bypass valve closed
7/11/2011	6:34:11 PM	Bubbler valve closed
7/11/2011	6:34:11 PM	Helium MFC set to  0.000000
7/11/2011	6:34:11 PM	H2 MFC set to  0.000000
7/11/2011	6:34:11 PM	BCl3 MFC set to  0.000000
7/11/2011	6:34:11 PM	PHl3 MFC set to  0.000000
7/11/2011	6:34:11 PM	SiCl4 MFC set to  0.000000
7/11/2011	6:34:11 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	6:34:11 PM	Tube furnace set to 0
7/11/2011	6:34:12 PM	Run finished at 6:34 PM
7/11/2011	6:36:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2011	6:36:40 PM	Recipe started at 6:36 PM
7/11/2011	6:36:40 PM	Helium valve closed
7/11/2011	6:36:40 PM	H2 valve closed
7/11/2011	6:36:40 PM	BCl3 valve closed
7/11/2011	6:36:40 PM	PH3 valve closed
7/11/2011	6:36:40 PM	SiCl4 pre valve closed
7/11/2011	6:36:40 PM	SiCl4 post valve closed
7/11/2011	6:36:40 PM	Main Vac valve closed
7/11/2011	6:36:40 PM	Bubbler valve closed
7/11/2011	6:36:40 PM	Bypass valve opened
7/11/2011	6:36:40 PM	Helium MFC set to  0.000000
7/11/2011	6:36:40 PM	H2 MFC set to  0.000000
7/11/2011	6:36:40 PM	BCl3 MFC set to  0.000000
7/11/2011	6:36:40 PM	PHl3 MFC set to  0.000000
7/11/2011	6:36:40 PM	SiCl4 MFC set to  0.000000
7/11/2011	6:36:40 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	6:36:40 PM	Tube furnace set to 0
7/11/2011	6:37:37 PM	Helium valve closed
7/11/2011	6:37:37 PM	H2 valve closed
7/11/2011	6:37:37 PM	BCl3 valve closed
7/11/2011	6:37:37 PM	PH3 valve closed
7/11/2011	6:37:37 PM	SiCl4 pre valve closed
7/11/2011	6:37:37 PM	SiCl4 post valve closed
7/11/2011	6:37:37 PM	Main Vac valve closed
7/11/2011	6:37:37 PM	Bubbler valve closed
7/11/2011	6:37:37 PM	Bypass valve opened
7/11/2011	6:37:37 PM	Helium MFC set to  0.000000
7/11/2011	6:37:37 PM	H2 MFC set to  0.000000
7/11/2011	6:37:37 PM	BCl3 MFC set to  0.000000
7/11/2011	6:37:37 PM	PHl3 MFC set to  0.000000
7/11/2011	6:37:37 PM	SiCl4 MFC set to  0.000000
7/11/2011	6:37:37 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	6:37:37 PM	Tube furnace set to 0
7/11/2011	6:38:37 PM	Helium valve closed
7/11/2011	6:38:37 PM	H2 valve closed
7/11/2011	6:38:37 PM	BCl3 valve closed
7/11/2011	6:38:37 PM	PH3 valve closed
7/11/2011	6:38:37 PM	SiCl4 pre valve closed
7/11/2011	6:38:37 PM	SiCl4 post valve closed
7/11/2011	6:38:37 PM	Bypass valve closed
7/11/2011	6:38:37 PM	Bubbler valve closed
7/11/2011	6:38:37 PM	Main Vac valve opened
7/11/2011	6:38:37 PM	Helium MFC set to  0.000000
7/11/2011	6:38:37 PM	H2 MFC set to  0.000000
7/11/2011	6:38:37 PM	BCl3 MFC set to  0.000000
7/11/2011	6:38:37 PM	PHl3 MFC set to  0.000000
7/11/2011	6:38:37 PM	SiCl4 MFC set to  0.000000
7/11/2011	6:38:37 PM	Bypass solenoid MFC set to  0.000000
7/11/2011	6:38:37 PM	Tube furnace set to 0
7/11/2011	6:38:38 PM	Run finished at 6:38 PM
7/11/2011	6:38:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
